Noh, S.-M., Kim, J.-H. and Jang, S.-Y. 2017. A SCHEDULE OF CLEANING PROCESSES FOR A SINGLE-ARMED CLUSTER TOOL. International Journal of Industrial Engineering: Theory, Applications and Practice. 24, 2 (Sep. 2017). DOI:https://doi.org/10.23055/ijietap.2017.24.2.2911.