Park C, Park SH, Kim SB. STRUCTURED REGULARIZATION MODELING FOR VIRTUAL METROLOGY IN SEMICONDUCTOR MANUFACTURING PROCESSES. Int J Ind Eng [Internet]. 2020 Jan. 5 [cited 2026 Jun. 19];26(6). Available from: https://ijietap.journals.publicknowledgeproject.org/ijietap/index.php/ijie/article/view/4985