Khakifirooz, M., Fathi, M. and Chien, C.-F. 2019. MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS. International Journal of Industrial Engineering: Theory, Applications and Practice. 25, 6 (Jan. 2019). DOI:https://doi.org/10.23055/ijietap.2018.25.6.4871.