Khakifirooz M, Fathi M, Chien C-F. MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS. Int J Ind Eng [Internet]. 2019 Jan. 8 [cited 2024 Nov. 25];25(6). Available from: https://ijietap.journals.publicknowledgeproject.org/index.php/ijie/article/view/4871